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Feature extraction, condition monitoring, and fault modeling in semiconductor manufacturing systems

  • Published:2013-04 Issue:3 Volume:64 Page:203-213
  • ISSN:0166-3615
  • Container-title:Computers in Industry
  • language:en
  • Short-container-title:Computers in Industry

Author:

Bleakie Alexander,Djurdjanovic Dragan

Publisher

Elsevier BV

Subject

General Engineering,General Computer Science

Reference34 articles.

1. http://www.sematech.org/meetings/archives/mfg/8194/8194.pdf.

2. ISMI Consensus Preventive and Predictive Maintenance Vision Ver. 1.1;Fulton,2007

3. Data mining in manufacturing environments: goals, techniques and applications;Buchner;Studies in Informatics and Control,1997

4. Predictive Modeling and Intelligent Maintenance Tools for High Yield Next Generation Fab;Liu,2005

5. Survey of Predictive Maintenance Research and Industry Best Practice;Djurdjanovic,2006
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