Feature extraction, condition monitoring, and fault modeling in semiconductor manufacturing systems

Author:

Bleakie Alexander,Djurdjanovic Dragan

Publisher

Elsevier BV

Subject

General Engineering,General Computer Science

Reference34 articles.

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2. ISMI Consensus Preventive and Predictive Maintenance Vision Ver. 1.1;Fulton,2007

3. Data mining in manufacturing environments: goals, techniques and applications;Buchner;Studies in Informatics and Control,1997

4. Predictive Modeling and Intelligent Maintenance Tools for High Yield Next Generation Fab;Liu,2005

5. Survey of Predictive Maintenance Research and Industry Best Practice;Djurdjanovic,2006

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