A virtual metrology method with prediction uncertainty based on Gaussian process for chemical mechanical planarization
Author:
Publisher
Elsevier BV
Subject
General Engineering,General Computer Science
Reference30 articles.
1. The effect of pad wear on the chemical mechanical polishing of silicon wafers;Byrne;CIRP Ann.,1999
2. Gaussian process regression for numerical wind speed prediction enhancement;Cai;Renew. Energy,2020
3. A combined filtering strategy for short term and long term wind speed prediction with improved accuracy;Cai;Renew. Energy,2019
4. Just-in-Time modeling with variable shrinkage based on gaussian processes for semiconductor manufacturing;Chan;IEEE Trans. Semicond. Manuf.,2018
5. Surface interactions in steel polishing for the precision tool making;Dambon;CIRP Ann.,2006
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