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Just-In-Time Modeling With Variable Shrinkage Based on Gaussian Processes for Semiconductor Manufacturing

  • Published:2018-08 Issue:3 Volume:31 Page:335-342
  • ISSN:0894-6507
  • Container-title:IEEE Transactions on Semiconductor Manufacturing
  • language:
  • Short-container-title:IEEE Trans. Semicond. Manufact.

Author:

Chan Lester Lik TeckORCID,Wu Xiaofei,Chen JunghuiORCID,Xie Lei,Chen Chun-I.ORCID

Funder

Ministry of Science and Technology

National Natural Science Foundation of China

Natural Science Foundation of Zhejiang Province

Western Digital

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Cited by 19 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A novel strategy of correntropy-based iterative neural networks for data reconciliation and gross error estimation in semiconductor industry;Journal of Process Control;2023-11

2. Adaptive Online Time-Series Prediction for Virtual Metrology in Semiconductor Manufacturing;2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2023-05-01

3. An improved virtual metrology method in chemical vapor deposition systems via multitask gaussian processes and adaptive active learning;The International Journal of Advanced Manufacturing Technology;2022-09-12

4. Understanding and Improving Virtual Metrology Systems Using Bayesian Methods;IEEE Transactions on Semiconductor Manufacturing;2022-08

5. On Updating a Virtual Metrology Model in Semiconductor Manufacturing via Transfer Learning;2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2022-05-02
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