The deposition and wear properties of cathodic arc plasma deposition TiAIN deposits
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
Reference31 articles.
1. Technical note: A review of cathodic arc plasma deposition processes and their applications
2. Ion-based methods for optical thin film deposition
3. Reduction in macroparticles during the deposition of TiN films prepared by arc ion plating
4. How to solve problems of films coated by ARC methods
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