Physical and chemical properties of the cylindrical rods SiCx (x = 0.3−1.2) grown from Si(CH3)2Cl2 by laser pyrolysis-Reference-Cited by-同舟云学术

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Physical and chemical properties of the cylindrical rods SiCx (x = 0.3−1.2) grown from Si(CH3)2Cl2 by laser pyrolysis

Published:1996-04 Issue:1 Volume:44 Page:59-66
ISSN:0254-0584
Container-title:Materials Chemistry and Physics
language:en
Short-container-title:Materials Chemistry and Physics

Author:

Chang Hua,Lee Long Jeng,Li Hwang Rong,Yeh Chiu Tih,Lin M.S.,Lou J.C.,Hseu T.H.,Wu T.B.,Chen Yeong-Jgi,Tang Chia-Pin

Publisher

Elsevier BV

Subject

Condensed Matter Physics,General Materials Science

Reference11 articles.

1. Chemical Processing with Laser;Bauerle,1986

2. Laser induced chemical vapor deposition of Ni by decomposition of Ni(CO)4

3. Lateral growth rates in laser CVD of microstructures

4. Laser induced chemical vapor deposition of carbon

5. Ar+laser induced chemical vapor deposition of Si from SiH4

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1. Chemical Vapor Deposition;Multi-dimensional Additive Manufacturing;2020-11-18

2. Chemical Vapor Deposition;Handbook of Solid State Chemistry;2017-08-09

3. Thermal barrier coatings deposited by laser CVD;Surface and Coatings Technology;2005-08

4. Laser chemical vapour deposition: materials, modelling, and process control;International Materials Reviews;2001-06

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