Lateral growth rates in laser CVD of microstructures-Reference-Cited by-同舟云学术

Lateral growth rates in laser CVD of microstructures

Published:1984-11 Issue:3 Volume:35 Page:155-159
ISSN:0721-7250
Container-title:Applied Physics A Solids and Surfaces
language:en
Short-container-title:Appl. Phys. A

Author:

Petzoldt F.,Piglmayer K.,Kr�uter W.,B�uerle D.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry,Physics and Astronomy (miscellaneous),General Engineering,General Materials Science

Link

http://link.springer.com/content/pdf/10.1007/BF00616969.pdf

Reference11 articles.

1. For a review see, e.g., D. Bäuerle: Mater. Res. Soc. Symp. Proc.17, 19?28 (Elsevier, New York 1983)

2. D. Bäuerle: InSurface Studies with Lasers, ed. by F. R. Aussenegg, A. Leitner, M. E. Lippitsch, Springer Ser. Chem. Phys.33 (Springer, Berlin, Heidelberg, New York 1983) pp. 178?188

3. W. Kräuter, D. Bäuerle, F. Fimberger: Appl. Phys. A31, 13 (1983)

4. K. Piglmayer, J. Doppelbauer, D. Bäuerle: Mater. Res. Soc. Symp. Proc. (Elsevier, New York 1984)

5. A.J. Davies:The Finite Element Method (Clarendon Press, Oxford 1980)

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