Significance of activation functions in developing an online classifier for semiconductor defect detection

Author:

Ferdaus Md MeftahulORCID,Zhou Bangjian,Yoon Ji Wei,Low Kain Lu,Pan JiemingORCID,Ghosh Joydeep,Wu MinORCID,Li XiaoliORCID,Thean Aaron Voon-Yew,Senthilnath J.ORCID

Funder

Agency for Science Technology and Research

Publisher

Elsevier BV

Subject

Artificial Intelligence,Information Systems and Management,Management Information Systems,Software

Reference50 articles.

1. Feature trend extraction and adaptive density peaks search for intelligent fault diagnosis of machines;Wang;IEEE Trans. Ind. Inf.,2018

2. Evolving deep echo state networks for intelligent fault diagnosis;Long;IEEE Trans. Ind. Inf.,2019

3. Stacked nanosheet gate-all-around transistor to enable scaling beyond FinFET;Loubet,2017

4. Transfer learning-based artificial intelligence-integrated physical modeling to enable failure analysis for 3 nanometer and smaller silicon-based CMOS transistors;Pan;ACS Appl. Nano Mater.,2021

5. TCAD-Enabled machine learning defect prediction to accelerate advanced semiconductor device failure analysis;Teo,2019

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