Author:
Maul J.,Schulz F.,Wittmaack K.
Subject
General Physics and Astronomy
Reference12 articles.
1. Proc. II. Int. Conf. Ion Implantation in Semiconductors,1971
2. Proc. II. Int. Conf. Ion Implantation in Semiconductors;Gamo,1971
3. Antimony implanted silicon: A comparison between the total implanted concentration profile and the donor concentration profile
4. RANGE AND DISTRIBUTION OF IMPLANTED BORON IN SILICON
5. Proc. II. Int. Conf. Ion Implantation in Semiconductors;Seidel,1971
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