On the analysis of an ECR plasma
Author:
Publisher
Elsevier BV
Subject
General Physics and Astronomy
Reference4 articles.
1. Low Temperature Chemical Vapor Deposition Method Utilizing an Electron Cyclotron Resonance Plasma
2. Magnetic field gradient effects on ion energy for electron cyclotron resonance microwave plasma stream
3. Collision phenomena in ionized gases;McDaniel,1964
4. Microwave Plasma Etching
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Sheet‐shaped plasma produced by electron cyclotron resonance heating;Review of Scientific Instruments;1994-07
2. Electromagnetic particle simulation of electron cyclotron resonance microwave discharge;Journal of Applied Physics;1993-05
3. High Performance Electron Cyclotron Resonance Plasma Etching with Control of Magnetic Field Gradient;Japanese Journal of Applied Physics;1991-11-30
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