Understanding of Si3N4-H3PO4 reaction chemistry for the control of Si3N4 dissolution kinetics
Author:
Publisher
Elsevier BV
Subject
General Chemical Engineering
Reference32 articles.
1. Mechanism of the chemical vapour deposition of Si3N4 films prepared from SiH2Cl2 and NH3 under kinetically controlled conditions
2. Bonding in silicon nitrides
3. Sputtered silicon nitride coatings for wear protection
4. Corrosion of Silicon Nitride Materials in Aqueous Solutions
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