Polybenzoxazole/graphene nanocomposite for etching hardmask
Author:
Funder
National Research Foundation of Korea
Ministry of Education
Publisher
Elsevier BV
Subject
General Chemical Engineering
Reference39 articles.
1. Sub-55 nm Etch Process Using Stacked-Mask Process
2. Line-edge roughness increase due to wiggling enhanced by initial pattern waviness
3. Novel Hybrid Organic–Inorganic Spin‐on Resist for Electron‐ or Photon‐Based Nanolithography with Outstanding Resistance to Dry Etching
4. Spin-on organic hardmask materials in 70nm devices
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1. Direct synthesis of sila-benzoazoles through hydrosilylation and rearrangement cascade reaction of benzoazoles and silanes;Nature Communications;2023-02-09
2. Ultra-low dielectric constant fluorinated graphene/polybenzoxazole composite films with excellent thermal stabilities and mechanical properties;Composites Part A: Applied Science and Manufacturing;2021-06
3. Diamine vapor treatment of viscoelastic graphene oxide liquid crystal for gas barrier coating;Scientific Reports;2021-05-04
4. Highly conductive polyimide nanocomposite prepared using a graphene oxide liquid crystal scaffold;Carbon;2020-11
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