Advances in plasma-enhanced chemical vapor deposition of silicon films at low temperatures

Author:

Collins R.W.,Ferlauto A.S.

Publisher

Elsevier BV

Subject

General Materials Science

Reference50 articles.

1. Wagner S, Taylor PC, Street RA, Schiff EA, editors, Amorphous and microcrystalline semiconductors—science and technology; Proceedings of the 18th International Conference on Amorphous and Microcrystalline Semiconductors, J Non-Cryst Solids, 2000, vols. 266–9, These proceedings include the research contributions presented at the 18th International Conference on Amorphous and Microcrystalline Semiconductors, held August 1999 in Snowbird UT, USA.

2. Godet C, Equer B, Mencaraglia D, Solomon I, Theye ML, Vignoli S, editors, Amorphous and microcrystalline semiconductors—science and technology; Proceedings of the 19th International Conference on Amorphous and Microcrystalline Semiconductors, J Non-Cryst Solids, 2002, vols. 299–302, These proceedings include the most up-to-date research results available on PECVD of amorphous and microcrystalline silicon thin films. These results were presented at the 19th International Conference on Amorphous and Microcrystalline Semiconductors, held August 2001 in Nice, France.

3. Glow-discharge hydrogenated amorphous silicon,1989

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