Design of a self-tuning adaptive model predictive controller using recursive model parameter estimation for real-time plasma variable control
Author:
Funder
MOTIE/KEIT
MOTIE
Publisher
Elsevier BV
Subject
Computer Science Applications,General Chemical Engineering
Reference29 articles.
1. Feedback control of plasma etching reactors for improved etching uniformity;Armaou;Chem. Eng. Sci.,2001
2. Plasma enhanced chemical vapor deposition: modeling and control;Armaou;Chem. Eng. Sci.,1999
3. On-line tuning strategy for model predictive controllers;Al-Ghazzawi;J. Process Control,2001
4. Predictive control using self tuning model predictive controllers library;Chalupa,2009
5. Real-time feedback control of electron density in inductively coupled plasmas;Chang;J. Vacuum Sci. Technol. A,2001
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