Control of photoresist film thickness: Iterative feedback tuning approach-Reference-Cited by-同舟云学术

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Control of photoresist film thickness: Iterative feedback tuning approach

Published:2006-01 Issue:3 Volume:30 Page:572-579
ISSN:0098-1354
Container-title:Computers & Chemical Engineering
language:en
Short-container-title:Computers & Chemical Engineering

Author:

Tay Arthur,Khuen Ho Weng,Deng Jiewen,Keng Lok Boon

Publisher

Elsevier BV

Subject

Computer Science Applications,General Chemical Engineering

Reference20 articles.

1. Principles of optics;Born,1980

2. Automatic control in microelectronics manufacturing: practices, challenges, and possibilities;Edgar;Automatica,2000

3. Introduction to modern optics;Fowles,1975

4. Iterative feedback tuning: theory and applications;Hjalmarsson;IEEE Control Systems Magazine,1998

5. A convergent iterative restricted complexity control design scheme;Hjalmarsson,1994

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4. Control of IPMC Actuators for Microfluidics With Adaptive “Online” Iterative Feedback Tuning;IEEE/ASME Transactions on Mechatronics;2012-08

5. IFTtune: a PID automatic tuning software tool;IFAC Proceedings Volumes;2012

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