Characteristics of Debris from a CO<SUB>2</SUB> Laser-Produced Plasma Using a Solid Tin Target for Development of Extreme Ultraviolet Source-Reference-Cited by-同舟云学术

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Characteristics of Debris from a CO₂ Laser-Produced Plasma Using a Solid Tin Target for Development of Extreme Ultraviolet Source

Published:2007 Issue:7 Volume:35 Page:457-461
ISSN:0387-0200
Container-title:The Review of Laser Engineering
language:en
Short-container-title:The Review of Laser Engineering

Author:

UENO Yoshifumi¹,SOUMAGNE Georg¹,SUMITANI Akira¹,ENDO Akira¹

Affiliation:

1. EUVA (Extreme Ultraviolet Lithography System Development Association) Hiratsuka R & D Center

Publisher

Laser Society of Japan

Link

https://www.jstage.jst.go.jp/article/lsj/35/7/35_457/_pdf

Reference15 articles.

1. 1) 2005 ITRS Lithography, Fig. 67 (2005) pp.24.

2. 2) V. Bakshi: EUV Sources for Lithography (SPIE PRESS, Bellingham, 2006) Chap. 2.

3. 3) H. Tanaka, A. Matsumoto, K. Akinaga, A. Takahashi, and T. Okada: Appl. Phys. Lett. 87 (2005) 041503.

4. 4) G. O'Sullivan and P. K. Carroll: J. Opt. Soc. Am. 71 (1981) 227.

5. 5) T. Tomie, T. Aota, Y. Ueno, G. Niimi, H. Yashiro, J. Q. Lin, I. Matsushima, K. Komiyama, D. H. Lee, K. Nishigori, and H. Yokota: Proc. SPIE 5037 (2003) 147.

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