The Development of Three-Intensity Measurement in PSA Ellipsometry and Photoelastic Modulation Ellipsometry
Reference30 articles.
1. Azzam RMA, Bashara NM. Ellipsometry and Polarized Light. Paperback. North Holland: Elsevier Science Publishers B.V.; 1987
2. Collins RW. Automatic rotating element ellipsometers: Calibration, operation, and real-time applications. Review of Scientific Instruments. 1990;61:2029-2062. DOI: 10.1063/1.1141417
3. Chao YF, Wei CS, Lee WC, Lin SC, Chao TS. Ellipsometric measurements and its alignment: Using the intensity ratio technique. Japanese Journal of Applied Physics. 1995;34:5016-5019. DOI: 10.1143/JJAP.34.5016
4. Chao YF, Lee WC, Hung CS, Lin JJ. A three-intensity technique for polarizer-sample-analyser photometric ellipsometry and polarimetry. Journal of Physics D: Applied Physics. 1998;31:1968-1974. DOI: 10.1088/0022-3727/31/16/005
5. Steel MR. Method for azimuthal alignment in ellipsometry. Applied Optics. 1971;10:2370-2371