Epitaxial Nitride Thin Film and Heterostructures: From Hard Coating to Solid State Energy Conversion
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IntechOpen
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http://www.intechopen.com/download/pdf/62446
Reference37 articles.
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2. Saha B, Shakouri A, Sands TD. Rocksalt nitride metal/semiconductor superlattices: A new class of artificially structured materials. Applied Physics Reviews. 2018;5:21101. DOI: 10.1063/1.5011972
3. Münz W. Titanium aluminum nitride films: A new alternative to TiN coatings. Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Film. 1986;4:2717-2725. DOI: 10.1116/1.573713
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5. Saha B, Lawrence SK, Schroeder JL, Birch J, Bahr DF, Sands TD. Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices. Applied Physics Letters. 2014;105:151904. DOI: 10.1063/1.4898067
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