Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices-Reference-Cited by-同舟云学术

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Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices

Published:2014-10-13 Issue:15 Volume:105 Page:151904
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Saha Bivas¹²,Lawrence Samantha K.¹,Schroeder Jeremy L.³,Birch Jens³,Bahr David F.¹,Sands Timothy D.¹²⁴

Affiliation:

1. School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, USA

2. Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA

3. Thin Film Physics Division, Department of Physics, Chemistry, and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden

4. School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, USA

Funder

National Science Foundation (NSF)

U.S. Department of Energy (DOE)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/am-pdf/10.1063/1.4898067

Reference37 articles.

1. W. D. Callister, Jr. , Materials Science and Engineering: An Introduction, 7th ed. ( John Wiley and Sons, Inc., 2007).

2. A. C. Fischer-Cripps , Nanoindentation, 2nd ed. ( Springer, 2004).

3. Designing Superhard Materials

4. On the hardness of coated systems

5. Hard and superhard nanocomposite coatings

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