Solid State Humidity Sensors

Abstract

A variety of humidity sensors have been developed to address the problem of humidity measurement in instrumentation, agriculture and systems which are automatic. Various types of humidity sensors have been reviewed along with their mechanisms of humidity detection. Thin and thick film preparation processes are quite flexible. This flexibility provides advantages over other technologies. After comparing all the aspects of different humidity sensors, it has been observed that there are still some shortcomings left, which need to be removed to enhance the humidity sensing capability, recovery and response times of the sensor elements.