A nanowire WO3 humidity sensor integrated with micro-heater and inverting amplifier circuit on chip manufactured using CMOS-MEMS technique

Author:

Dai Ching-Liang,Liu Mao-Chen,Chen Fu-Song,Wu Chyan-Chyi,Chang Ming-Wei

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. Fast response humidity sensors for a medical microsystem;Tetelin;Sens. Actuators B,2003

2. Environmental sensors based on micromachined cantilevers with integrated read-out;Boisen;Ultramicroscopy,2000

3. High-sensitivity polyimide for monitoring hermetic micropackages;Dokmeci,1999

4. Integrated multisensors for industrial humidity measurement;Bokmann,2001

5. Microsensors MEMS and Smart Devices;Gardner,2001

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