Bombardment of Metals by Inert Gas Ions

Author:

Ogilvie GJ

Abstract

When the surface of a metal crystal is bombarded by inert gas ions, metal atoms are knocked off the surface in certain preferred directions. Evidence is presented to show that some atoms are also knocked into the crystal. A thin disoriented surface layer appears which, if the crystal is an alloy, is of uniform but different composition from that of the original crystal, The importance of these findings to some current ideas about damage due to bombardment is briefly discussed and it is shown that present theories do not account satisfactorily for the observations.

Publisher

CSIRO Publishing

Subject

General Physics and Astronomy

Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Transients in the composition of material sputtered from alloy targets;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1984-03

2. Ion-Bombardment-Induced Composition Changes in Alloys and Compounds;Ion Implantation and Beam Processing;1984

3. Diffusion enhancement due to low‐energy ion bombardment during sputter etching and deposition;Journal of Applied Physics;1980-08

4. Techniques for elemental composition profiling in thin films;C R C Critical Reviews in Solid State Sciences;1973-12

5. Experimental Techniques;Chemisorption and Reactions on Metallic Films;1971

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