Spectroscopic diagnostic complex based on the magnetron sputtering device with a digital method of the data mining-Reference-Cited by-同舟云学术

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Spectroscopic diagnostic complex based on the magnetron sputtering device with a digital method of the data mining

Published:2020-11-30 Issue:2 Volume:2 Page:1-8
ISSN:2582-2195
Container-title:Frontiers in Advanced Materials Research
language:
Short-container-title:Front. Adv. Mater. Res.

Author:

I.A. Afanasіeva,S.N. Afanasiev,N.A. Azarenkov,V.V. Bobkov,V.V. Gritsyna,I.I. Okseniuk,A.A. Skrypnyk,D.I. Shevchenko

Abstract

A diagnostic complex based on a magnetron sputtering device is proposed for studying a magnetron discharge plasma parameter by optical emission spectroscopy, using two spectroscopic systems: photographic and photoelectric. Software for digital processing of the obtained emission spectra is developed. The results obtained by the two spectroscopic systems are compared.

Publisher

IOR Press

Reference15 articles.

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4. S. Pfau, M. Tichý, Langmuir probe diagnostics of low-temperature plasma, in R. Hippler, S. Pfau, M. Schmidt, K.H. Schoenbach, Low temperature plasma physics, WILEY-VCH, Verlag, Berlin, (2000) 131–172.

5. Yu.A. Zheleznov, V.Yu. Khomich, (2011) Prirladnaya Physika 3 60 (In russian).

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