Spatial structures of plasma parameters in a magnetic neutral loop discharge
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference18 articles.
1. Application of Radio-Frequency Discharged Plasma Produced in Closed Magnetic Neutral Line for Plasma Processing
2. Plasma Production Using Energetic Meandering Electrons
3. A planar inductively coupled radio-frequency magnetic neutral loop discharge
4. Very uniform and high aspect ratio anisotropy SiO2 etching process in magnetic neutral loop discharge plasma
5. SiO2 etching in magnetic neutral loop discharge plasma
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