Affiliation:
1. Department of Chemistry and Chemical Biology, Harvard University, Cambridge, Massachusetts 02138;, , , ,
Abstract
▪ Abstract Nanostructures are fabricated using either conventional or unconventional tools—that is, by techniques that are highly developed and widely used or by techniques that are relatively new and still being developed. This chapter reviews techniques of unconventional nanofabrication, and focuses on experimentally simple and inexpensive approaches to pattern features with dimensions <100 nm. The techniques discussed include soft lithography, scanning probe lithography, and edge lithography. The chapter includes recent advances in fabricating nanostructures using each set of techniques, together with demonstrated advantages, limitations, and applications for each.
Subject
General Materials Science
Cited by
320 articles.
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