Influence of Surface Halogenation on Silane Adsorption onto Si(001) Surface for Poly-Si Epitaxy: A Density Functional Theory Study with Neural Network Potential-Reference-Cited by-同舟云学术

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Influence of Surface Halogenation on Silane Adsorption onto Si(001) Surface for Poly-Si Epitaxy: A Density Functional Theory Study with Neural Network Potential

Published:2023-09-27 Issue: Volume: Page:
ISSN:
Container-title:2023 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
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Author:

Jeong Hyunhak¹,Kim Byungjo¹,Yoo Suyoung¹,Nam Sang Ki¹

Affiliation:

1. Samsung Electronics Co., Ltd.,Mechatronics Research,Hwaseong-si,South Korea

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10319472/10319477/10319640.pdf?arnumber=10319640

Reference21 articles.

1. Low-energy electron energy loss spectroscopy of Cl adsorbed Si(111), Si(100) and Si(110) surfaces

2. Chemisorption of HCl, Cl2 and F2 on the Si(100) surface

3. Energetics of Si(001) Surfaces Exposed to Electric Fields and Charge Injection

4. Theoretical calculations for Si(001)-(2×1)Cl

5. A SLAB-MINDO study of half monolayer and monolayer chemisorption of chlorine on the silicon (001) surface

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