An AI-Enabled Framework for Smart Semiconductor Manufacturing-Reference-Cited by-同舟云学术

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An AI-Enabled Framework for Smart Semiconductor Manufacturing

Published:2024-03-25 Issue: Volume:30 Page:1-6
ISSN:
Container-title:2024 Design, Automation & Test in Europe Conference & Exhibition (DATE)
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Author:

Alamin Khaled Sidahmed Sidahmed¹,Appello Davide²,Beghi Alessandro³,Dall'Ora Nicola⁴,Depaoli Fabio¹,Di Cataldo Santa¹,Fummi Franco⁴,Gaiardelli Sebastiano⁴,Lora Michele⁴,Macii Enrico¹,Mascolini Alessio¹,Pagano Daniele⁵,Ponzio Francesco¹,Susto Gian Antonio³,Vinco Sara¹

Affiliation:

1. Politecnico di Torino,Italy

2. Technoprobe Spa,Italy

3. University of Padova,Italy

4. University of Verona,Italy

5. STMicroelectronics,Italy

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx8/10546498/10546499/10546768.pdf?arnumber=10546768

Reference29 articles.

1. Global semiconductor sales increase 1.9% month-to-month in september,2023

2. European Chips Act;Commission,2022

3. Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities

4. Planned Maintenance Schedule Update Method for Predictive Maintenance of Semiconductor Plasma Etcher

5. A Practical Two-Phase Approach to Scheduling of Photolithography Production

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