A Seismic-Grade Optical MEMS Accelerometer with Force Feedback Control
Author:
Affiliation:
1. Southeast University,School of Instrument Science and Engineering,Nanjing,China,210096
Funder
National Natural Science Foundation of China
Fundamental Research Funds for the Central Universities
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9815262/9815332/09815378.pdf?arnumber=9815378
Reference33 articles.
1. Seismometer self-noise estimation using a single reference instrument
2. High sensitivity optomechanical reference accelerometer over 10 kHz
3. Fourier optics analysis of grating sensors with tilt errors
4. Optically read displacement detection using phase-modulated diffraction gratings with reduced zeroth-order reflections
5. A Review of the Capacitive MEMS for Seismology
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range;IEEE Transactions on Industrial Electronics;2024-06
2. Modeling, Simulation, and Optimization of Piezoelectrically Actuated Dual-Axis MEMS Accelerometer for Seismic Sensing;Journal of Vibration Engineering & Technologies;2023-10-31
3. Implementación en hardware para la medición de la aceleración usando FPGA;Revista Sapientía;2023-09-11
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