Optically read displacement detection using phase-modulated diffraction gratings with reduced zeroth-order reflections
Author:
Affiliation:
1. Department of Electrical and Computer Engineering, The University of Texas at Austin, Austin, Texas 78712, USA
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/am-pdf/10.1063/1.4979541
Reference24 articles.
1. Performance and Modeling of a Fully Packaged Micromachined Optical Microphone
2. Lamellar Grating Far-Infrared Interferomer
3. Deformable grating optical modulator
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