Infrared Reflectivity Determination of Alloy Composition in AlxGa1–xAs and InxGa1–xAs Structures

Author:

Engelbrecht J. A. A.1,Botha J. R.1

Affiliation:

1. Department of Physics, University of Port Elizabeth, P.O. Box 1600, Port Elizabeth 6000, South Africa (J.A.A.E.); and Department of Physics, University of the Western Cape, South Africa (J.R.B.)

Abstract

Fourier transform infrared reflectance spectroscopy can be used to establish the height of the transverse optic mode peak of AlAs at 361 cm−1. The peak height is found to be linearly dependent on the aluminum content in Al xGa1– xAs layers on GaAs substrates. Previously published spectra for In xGa1– xAs yielded a similar result for the In content, from the transverse optic mode peak of InAs at 220 cm−1. A quick and nondestructive technique is proposed for the determination of the aluminum and indium mole fraction in these structures.

Publisher

SAGE Publications

Subject

Spectroscopy,Instrumentation

Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Comments on a peak of Al x Ga 1 − x N observed by infrared reflectance;Infrared Physics & Technology;2016-05

2. Large area mapping of the alloy composition of Al x Ga1-x N using infrared reflectivity;physica status solidi (RRL) - Rapid Research Letters;2009-05-22

3. Vibrational Spectroscopy for the Analysis of Geological and Inorganic Materials;Encyclopedia of Analytical Chemistry;2006-09-15

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