Parallel-Plate Wet Denuder Coupled Ion Chromatograph for Near-Real-Time Detection of Trace Acidic Gases in Clean Room Air-Reference-Cited by-同舟云学术

Parallel-Plate Wet Denuder Coupled Ion Chromatograph for Near-Real-Time Detection of Trace Acidic Gases in Clean Room Air

Author:

TAKEUCHI Masaki¹,TSUNODA Hiromichi²,TANAKA Hideji¹,SHIRAMIZU Yoshimi³

Affiliation:

1. Institute of Health Biosciences, The University of Tokushima Graduate School

2. Graduate School of Pharmaceutical Sciences, The University of Tokushima

3. Process Module & Integration Engineering Department, Renesas Electronics Co.

Publisher

Springer Science and Business Media LLC

Subject

Analytical Chemistry

Link

Reference23 articles.

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3. 3. D. Ruede, M. Ercken, and T. Borgers, Solid State Technol., 2001, 44, 63.

4. 4. International Technology Roadmap for Semiconductors, 2009 ed., 2009, Yield Enhancement, Table YE7.

5. 5. J. K. Higley and M. A. Joffe, Solid State Technol., 1996, 39, 211.

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