Diagnostic study on the electron density distribution of microwave plasma jet in local vacuum environment

Abstract

In order to diagnose the electron density of microwave plasma jet confined by solid boundary walls, the emission/Langmuir probe was applied to measure the plasma space potential and current and voltage property when the probe is charged by heating and scanning power supply separately. According to the plasma space potential, saturated current on the current-voltage characteristics of plasma can be distinguished, which can be used to estimate the number density of electrons in the plasma. The results show that the magnitude of electron density ranges from 8.8×1014 to 7.53×1016/m3, the electron density on the centerline of jet decreases linearly off the nozzle exit plane, but it has approximately parabolic distribution along the plasma jet direction when leaving the centerline. Increasing mass flow rate at constant power and increasing power at constant mass flow rate will increase electron density.