Author:
Feng Bo-Wen,Wang Ruo-Yu,Ma Yu-Peng-Xue,Zhong Xiao-Xia, ,
Abstract
Based on the Stark broadening method and the imaging method, the electron densities of the plasma generated at different pulse frequencies, gap distances and inner diameters of the electrodes are diagnosed. The experimental results indicate that reducing the pulse frequency, shortening the gap distance between the electrodes, and using thinner diameter electrode are all in favor of enhancing the electron density. With the help of the global model, we perform the numerical simulation to explore the factors that influence the variation of the electron density. According to the simulations results, we find that the reduced discharge volume results in the increase of electron density with the increase of pulse frequency. When the gap distance between the electrodes is reduced, although the increased absorbed power and the reduced discharge volume both have an effect on the electron density, the reduced discharge volume plays a decisive role in these two factors. Moreover, using a thinner inner diameter electrode can also reduce the discharge volume, which is of benefit to obtaining the plasma with high electron density.
Publisher
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
Subject
General Physics and Astronomy
Reference42 articles.
1. Zou S, Tang Z H, Ji L L, Su X D, Xin Y 2012 Acta Phys. Sin. 61 075024
邹帅, 唐中华, 吉亮亮, 苏晓东, 辛煜 2012 物理学报 61 075024
2. Cui R, Han R, Yang K, Zhu W Y, Wang Y Q 1, Zhang Z, Ouyang J T 2020 Plasma Sources Sci. Technol. 29 015018
3. Xin Y, Di X L, Yu Y Q, Ning Z Y 2006 Acta Phys. Sin. 55 3494
辛煜, 狄小莲, 虞一青, 宁兆元 2006 物理学报 55 3494
4. Jiang C, Miles J, Hornef J, Carter C, Adams S 2019 Plasma Sources Sci. Technol. 28 085009
5. Keudel A V, Gathe S V D 2017 Plasma Sources Sci. Technol. 26 113001
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献