Structural and photoluminescence characters of SnO22:Sb thin films pr epared by rf magnetron sputtering

Abstract

SnO22:Sb films have been prepared on glass substrates by rf magnetron sputtering method. The prepared samples are polycrystalline thin films with rutile structure of pure SnO22 and have orientation of ［110］ direction. The phot oluminescence of the samples was measured at room temperature. An ultraviolet-violet luminescence peak near 392nm was observed. The effect of different oxygen partia l pressures on the structure and luminescence was investigated, and the luminesc ent mechanism was also tentatively investigated.