Author:
Xu Jian-Liang ,Wang Min ,Pan Hui ,Liu Xiao-Hui ,Qi Xiao-Li ,Xu Si-Xiang ,
Abstract
Based on the resarch of the traditional Fourier transform profilometry, Fourier transform profilometry of tilted measurement system is proposed in this paper. The proposed technology makes the three constraints of the traditional Fourier transform profilometry measurement system less stringent. The optical axis in the CCD imaging system is not necessarily perpendicular (with a certain tilting angle) to the reference plane. The connection line between the centers of the exit pupil of the projecting system and the entrance pupil of the CCD imaging system is not required to be horizontal to the reference plane. The optical axis of the CCD imaging system and that of the projecting system are not coplanar, moreover, the two axises do not intersect at a point in the reference plane. Through the stringent theoretical analysis, the mathematical relationship between phase and height is obtained. Compared with the traditional Fourier transform profilometry, the tilted measurement system is more practical.
Publisher
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
Subject
General Physics and Astronomy
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