Author:
He Zhi-Bing ,Yang Zhi-Lin ,Yan Jian-Cheng ,Song Zhi-Min ,Lu Tie-Cheng , ,
Abstract
Different glow discharge polymer (GDP) thin-films are prepared at various working pressures and flux ratios of trans-2-butune (T2B) to H2 by using low-pressure plasma enhanced chemical vapor deposition technology. Hydrogen atomic content and network structure of GDP thin-film are characterized by element analysis and Fourier transform infrared spectrum. The hardness and modulus of GDP coating are measured by nanoindentation. It is found that when working pressure and flux ratio between T2B and H2 gradually decrease, hydrogen content and sp3 CH3 groups decrease, sp2 CH2 and sp3 CH1,2 groups increase and hardness H and Youngs modulus E of GDP coating and the cross-linking degree of carbon network inerease.
Publisher
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
Subject
General Physics and Astronomy
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