Author:
Xie Jing ,Li Bing ,Li Yuan-Jie ,Yan Pu ,Feng Liang-Huan ,Cai Ya-Ping ,Zheng Jia-Gui ,Zhang Jing-Quan ,Li Wei ,Wu Li-Li ,Lei Zhi ,Zeng Guang-Gen ,
Abstract
ZnS thin films were prepared on glass substrate by RF magnetron sputtering technique.The quality of ZnS films formed at different deposition pressures,annealing temperatures and substrate temperatures were studied.The change of the film microstructure was analyzed by XRD and the lattice stress was evaluated.The spectral transmittance was measured by a spectrometer.From the spectrum,the band gap and Urbach energy were calculated.Scanning electron microscopy (SEM) was used to study the morphology of the surface of the sample.The result showed that there is big stress in the lattice when the substrate is at room temperature,and the value of stress increases with the pressure.After annealing at 300 ℃,the stress is minimal.When the substrate temperature is 350 ℃,the stress decreases,at the same time,ZnS films have good transmittance,and annealing at 300 ℃ improves the film quality.
Publisher
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
Subject
General Physics and Astronomy
Reference19 articles.
1. McCandless E B,Dobson D K 2004 Sol.Energy. 77 839
2. Wu X,Zhou J,Duda A,Keane J C,Dhere R G,Gessert T A,Yan Y,Noufi R 2001 17th European Solar Energy Conference (Munich:WIP) 995
3. Martin AGreen 2002 Physica E14 65
4. Martin AGreen 2000 Energy Policy. 28 989
5. Qin Y,Zhang H,Tan S L,Liu T,Zhang P X 2009 Acta Phys.Sin. 58 3497 (in Chinese)[秦 毅、张 辉、谈松林、刘 婷、张鹏翔 2009 物理学报 58 3497]
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