Transient behavior of electrostatically-actuated micro systems considering squeeze film damping and mechanical shock
Author:
Publisher
SciTech Solutions
Subject
General Engineering
Link
http://scientiairanica.sharif.edu/article_4245_8a7fd3a8840bf0f73e843fb0b0fa6069.pdf
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Squeeze Film Effect in Surface Micromachined Nano Ultrasonic Sensor for Different Diaphragm Displacement Profiles;Sensors;2023-05-11
2. Effect of Dispersion Forces on Dynamic Stability of Electrostatically Actuated Micro/Nano-Beams in Presence of Mechanical Shocks;International Journal of Applied Mechanics;2019-11
3. Shock response of electrostatically coupled microbeams under the squeeze-film damping effect;Acta Mechanica;2018-10-25
4. Size Effect Investigation on Lateral Vibrations of a Micro Drill Subjected to an Axial Load Using the Modified Couple Stress Theory;Scientia Iranica;2018-05-14
5. Dynamic pull-in and snap-through behavior of electrostatically actuated micro-mechanical memories considering thermoelastic damping;Mechanics of Advanced Materials and Structures;2018-04-19
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