Shock response of electrostatically coupled microbeams under the squeeze-film damping effect
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Computational Mechanics
Link
http://link.springer.com/article/10.1007/s00707-018-2301-5/fulltext.html
Reference35 articles.
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3. Ibrahim, M., Younis, M.I.: The dynamic response of electrostatically driven resonators under mechanical shock. J. Micromech. Microeng. 20(2), 025006 (2009)
4. Wagner, U., Frank, J., Schweiker, M., Bernhard, W., Muller-Fiedler, R., Michel, B., Paul, O.: Mechanical reliability of MEMS-structures under shock load. Microelectron. Reliab. 41(9–10), 1657–1662 (2001)
5. Tavakolian, F., Farrokhabadi, A., Mirzaei, M.: Pull-in instability of double clamped microbeams under dispersion forces in the presence of thermal and residual stress effects using nonlocal elasticity theory. Microsyst. Technol. 23(4), 839–848 (2015)
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