1. Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan.
2. Institut Pprime, CNRS, Université de Poitiers, ISAE-ENSMA, F-86962 Futuroscope Chasseneuil, France.
3. Laboratory for Integrated Micro Mechatronic Systems/National Center for Scientific Research–Institute of Industrial Science (LIMMS/CNRS-IIS), The University of Tokyo, Tokyo 153-8505, Japan.
4. CEMHTI, UPR3079, CNRS, Université Orléans, F-45071 Orléans, France.