Remote epitaxial interaction through graphene

Author:

Chang Celesta S.12ORCID,Kim Ki Seok12ORCID,Park Bo-In12ORCID,Choi Joonghoon3ORCID,Kim Hyunseok1ORCID,Jeong Junseok1ORCID,Barone Matthew4ORCID,Parker Nicholas4ORCID,Lee Sangho12ORCID,Zhang Xinyuan25,Lu Kuangye1ORCID,Suh Jun Min12ORCID,Kim Jekyung1ORCID,Lee Doyoon1ORCID,Han Ne Myo1ORCID,Moon Mingi6ORCID,Lee Yun Seog6ORCID,Kim Dong-Hwan78ORCID,Schlom Darrell G.4910ORCID,Hong Young Joon3ORCID,Kim Jeehwan12511ORCID

Affiliation:

1. Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA.

2. Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, MA 02139, USA.

3. GRI–TPC International Research Center and Department of Nanotechnology and Advanced Materials Engineering, Sejong University, Seoul 05006, Republic of Korea.

4. Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14850, USA.

5. Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA.

6. Department of Mechanical Engineering, Seoul National University, Seoul, Republic of Korea.

7. School of Chemical Engineering, Sungkyunkwan University (SKKU), Suwon 16419, Republic of Korea.

8. Biomedical Institute for Convergence at SKKU (BICS), Sungkyunkwan University (SKKU), Suwon 16419, Republic of Korea.

9. Kavli Institute at Cornell for Nanoscale Science, Ithaca, NY 14853, USA.

10. Leibniz-Institut für Kristallzüchtung, 12489 Berlin, Germany.

11. Microelectronic Technology Laboratory, Massachusetts Institute of Technology, Cambridge, MA 02139, USA.

Abstract

The concept of remote epitaxy involves a two-dimensional van der Waals layer covering the substrate surface, which still enable adatoms to follow the atomic motif of the underlying substrate. The mode of growth must be carefully defined as defects, e.g., pinholes, in two-dimensional materials can allow direct epitaxy from the substrate, which, in combination with lateral epitaxial overgrowth, could also form an epilayer. Here, we show several unique cases that can only be observed for remote epitaxy, distinguishable from other two-dimensional material-based epitaxy mechanisms. We first grow BaTiO 3 on patterned graphene to establish a condition for minimizing epitaxial lateral overgrowth. By observing entire nanometer-scale nuclei grown aligned to the substrate on pinhole-free graphene confirmed by high-resolution scanning transmission electron microscopy, we visually confirm that remote epitaxy is operative at the atomic scale. Macroscopically, we also show variations in the density of GaN microcrystal arrays that depend on the ionicity of substrates and the number of graphene layers.

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

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