In operando x-ray imaging of nanoscale devices: Composition, valence, and internal electrical fields

Author:

Johannes Andreas1ORCID,Salomon Damien1,Martinez-Criado Gema12,Glaser Markus3,Lugstein Alois3ORCID,Ronning Carsten4ORCID

Affiliation:

1. European Synchrotron Radiation Facility, 71 Avenue des Martyrs, Grenoble 30843, France.

2. Instituto de Ciencia de Materiales de Madrid, Consejo Superior de Investigaciones Científicas, 28049 Cantoblanco, Spain.

3. Institute for Solid State Electronics, Technische Universität Wien, Floragasse 7, 1040 Vienna, Austria.

4. Institute of Solid State Physics, Friedrich-Schiller-University Jena, Max-Wien-Platz 1, 07743 Jena, Germany.

Abstract

Unrivaled XANES imaging resolution of <100 nm, XANES and XBIC conclusively identify the active area of a nanowire device.

Funder

Deutsche Forschungsgemeinschaft

European Synchrotron Radiation Facility

Bundesministerium für Bildung und Forschung

Austrian Science Fund

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

Reference42 articles.

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2. A. Kaneko A. Yagishita K. Yahashi T. Kubota M. Omura K. Matsuo I. Mizushima K. Okano H. Kawasaki S. Inaba T. Izumida T. Kanemura N. Aoki K. Ishimaru H. Ishiuchi K. Suguro K. Eguchi Y. Tsunashima Sidewall transfer process and selective gate sidewall spacer formation technology for sub-15nm FinFET with elevated source/drain extension IEEE International Electron Devices Meeting 2005. IEDM Technical Digest Washington DC 5 December 2005 (IEEE 2005).

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4. In situ observation of enhanced photoinduced charge separation in a gold nanoparticle assembly immobilized on TiO2;Harada H.;ChemistrySelect,2016

5. Microscopic analysis of inherent void passivation in perovskite solar cells;Seo G.;ACS Energy Lett.,2017

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