Electrochemical electron beam lithography: Write, read, and erase metallic nanocrystals on demand-Reference-Cited by-同舟云学术

Electrochemical electron beam lithography: Write, read, and erase metallic nanocrystals on demand

Published:2017-07-07 Issue:7 Volume:3 Page:
ISSN:2375-2548
Container-title:Science Advances
language:en
Short-container-title:Sci. Adv.

Author:

Park Jeung Hun¹²³,Steingart Daniel A.²,Kodambaka Suneel¹,Ross Frances M.³

Affiliation:

1. Department of Materials Science and Engineering, University of California, Los Angeles, 410 Westwood Plaza, Los Angeles, CA 90095, USA.

2. Department of Mechanical and Aerospace Engineering, and Andlinger Center for Energy and the Environment, Princeton University, Princeton, NJ 08544, USA.

3. IBM Thomas J. Watson Research Center, 1101 Kitchawan Road, Yorktown Heights, NY 10598, USA.

Abstract

We develop an electrochemistry- and radiolysis-based patterning technique for site-specific deposition and dissolution of metallic nanocrystals.

Funder

National Science Foundation

BP Global

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

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