Affiliation:
1. Department of Chemistry and Chemical Biology, Harvard University, 12 Oxford Street, Cambridge, MA 02138, USA.
Abstract
We demonstrate the patterned assembly of integrated semiconductor devices onto planar, flexible, and curved substrates on the basis of capillary interactions involving liquid solder. The substrates presented patterned, solder-coated areas that acted both as receptors for the components of the device during its assembly and as electrical connections during its operation. The components were suspended in water and agitated gently. Minimization of the free energy of the solder-water interface provided the driving force for the assembly. One hundred and thirteen GaAlAs light-emitting diodes with a chip size of 280 micrometers were fabricated into a prototype cylindrical display. It was also possible to assemble 1500 silicon cubes, on an area of 5 square centimeters, in less than 3 minutes, with a defect rate of ∼2%.
Publisher
American Association for the Advancement of Science (AAAS)
Reference28 articles.
1. M. B. Cohn et al. Proc. SPIE Micromachining and Microfabrication Santa Clara CA 20 to 22 September 1998 (IEEE New York 1998) p. 2.
2. R. S. Fearing IEEE/RSJ Proc. Int. Intell. Robots Syst. 2 212 (1995).
3. Yeh H. J., Smith J. S., IEEE Photonics Technol. Lett. 6, 706 (1994).
4. Hosokawa K., Shimoyama I., Miura H., Sens. Actuators A57, 117 (1996).
5. Dahlman G. W., Yeatman E. M., Electron. Lett. 36, 1707 (2000).
Cited by
325 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献