Affiliation:
1. Fachgebiet Nanotechnologie Technische Universität Ilmenau Gustav‐ Kirchhoff‐Str.1 98693 Ilmenau Germany
2. Zentrum für Mikro‐ und Nanotechnologien Technische Universität Ilmenau Gustav‐Kirchhoff‐ Str.7 98693 Ilmenau Germany
3. Offshore Mechanics Laboratory Escola Politécnica Universidade de São Paulo Avenida Prof. Luciano Gualberto, Travessa do Politécnico 380 São Paulo 05508‐020 Brazil
Abstract
AbstractTransport and alignment of microscopic chips are important steps in microelectronics component integration with common approaches being pick‐and‐place, microfluidics, parallel transfer and self‐assembly. An alternate transport approach of microscopic chips is proposed using patterned liquid micro rails as chaperones. The surface free energy and interfacial free energy minimization of all constituents enable the creation of stable pathways. This allows for chip‐attachment to rails, while the liquid layer lubricates chip‐sliding. Monorails, digital monorails, and digital birails are investigated for chip movement behavior. Chip position and speed can be controlled using liquid flow in closed chambers. Speeds from 10 to 400 mm s−1 are achieved with translation distances as long as 50 mm. It is discovered that chips can selectively cross rail discontinuities of up to 500 µm, allowing for chip position control through a stop‐and‐go motion. A programmable liquid rails‐based chip conveyor system is demonstrated by transporting diodes to receptor sites where they undergo self‐assembly.
Funder
Deutsche Forschungsgemeinschaft