Synthesis of Buried Oxide and Silicide Layers with Ion Beams-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Synthesis of Buried Oxide and Silicide Layers with Ion Beams

Published:1988-08-19 Issue:4868 Volume:241 Page:930-935
ISSN:0036-8075
Container-title:Science
language:en
Short-container-title:Science

Author:

White Alice E.¹,Short K. T.¹

Affiliation:

1. AT&T Bell Laboratories, Murray Hill, NJ 07974.

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

Reference46 articles.

1. MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS 1986 53

2. Appleton, B. R., Ion Implantation and Beam Processing: 189 (1984).

3. BADAWI, M.H., STUDY OF SILICON-OXIDES PREPARED BY OXYGEN IMPLANTATION INTO SILICON, JOURNAL OF PHYSICS D-APPLIED PHYSICS 10: 1931 (1977).

4. BARBOUR, J.C., MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS 107: 269 (1988).

5. Beadle, W. E., Quick Reference Manual for Silicon Integrated Circuit Technology: 9-1 (1985).

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Materials Processing;Ion Beams in Materials Processing and Analysis;2012

2. Controlling metal nanotoppings on the tip of silicide nanostructures;Nanotechnology;2009-05-27

3. Epitaxy;Materials Science of Thin Films;2002

4. Modification of Surfaces and Films;The Materials Science of Thin Films;1992

5. Single‐crystalline aluminum layer buried in α‐Al2O3;Applied Physics Letters;1990-06-25

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP