End-bonded contacts for carbon nanotube transistors with low, size-independent resistance

Abstract

Making better small contacts Semiconducting single-walled carbon nanotubes have potential size and conductivity advantages over silicon for making smaller transistors. However, as metal electrical contacts decrease in size, the associated resistance increases to impractical values. Cao et al. reacted molybdenum films with semiconducting carbon nanotubes to create a carbide contact. The resistance of these contacts remained low even for 10-nm-scale contacts. Science , this issue p. 68