New Methods of Processing Silicon Slices
Author:
Affiliation:
1. Fellow at Texas Instruments Incorporated, Dallas 75265
Publisher
American Association for the Advancement of Science (AAAS)
Subject
Multidisciplinary
Reference9 articles.
1. Reinberg A. R. U.S. Patent 3 757 733 (1973).
2. Reinberg A. R. U.S. Patent 4 069 096 (1978).
3. APPELS, J.A., LOCAL OXIDATION OF SILICON AND ITS APPLICATION IN SEMICONDUCTOR-DEVICE TECHNOLOGY, PHILIPS RESEARCH REPORTS 25: 118 (1970).
4. COBURN, J.W., ION-SURFACE INTERACTIONS IN PLASMA ETCHING, JOURNAL OF APPLIED PHYSICS 48: 3532 (1977).
5. GLEIT, C.E., USE OF ELECTRICALLY EXCITED OXYGEN FOR LOW TEMPERATURE DECOMPOSITION OF ORGANIC SUBSTANCES, ANALYTICAL CHEMISTRY 34: 1454 (1962).
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