Microstructure Fabrication-Reference-Cited by-同舟云学术

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Microstructure Fabrication

Published:1977-05-27 Issue:4293 Volume:196 Page:945-949
ISSN:0036-8075
Container-title:Science
language:en
Short-container-title:Science

Author:

Keyes Robert W.¹

Affiliation:

1. IBM Thomas J. Watson Research Center, Yorktown Heights, New York 10598

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

Reference11 articles.

1. Business Week: 62 (28 6 1976).

2. Aigrain, P., ISSCC Digest of Technical Papers, 1976 International Solid-State Circuits Conference: 49 (1976).

3. DILL, F. H., IEEE TRANSACTIONS ON ELECTRON DEVICES 22: 440 (1975).

4. Modern Microelectronics 1972

5. The Theory and Practice of Microelectronics 1968

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Exceptional Light Sensitivity by Thiol–Ene Click Lithography;Journal of the American Chemical Society;2023-01-10

2. Research on the transient forming process and high-temperature stability mechanism of warm laser shock imprinting;Optics and Lasers in Engineering;2021-11

3. On the dynamics and evolution of some sociotechnical systems;Bulletin of the American Mathematical Society;1987

4. Limitations of Small Devices and Large Systems;VLSI Electronics Microstructure Science;1981

5. Polymer photophysics: A negative photoresist;Journal of Chemical Education;1979-08

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