Large-scale nanoshaping of ultrasmooth 3D crystalline metallic structures

Author:

Gao Huang12,Hu Yaowu12,Xuan Yi32,Li Ji12,Yang Yingling12,Martinez Ramses V.45,Li Chunyu26,Luo Jian7,Qi Minghao32,Cheng Gary J.128

Affiliation:

1. School of Industrial Engineering, Purdue University, West Lafayette, IN 47907, USA

2. Birck Nanotechnology Center, Purdue University, West Lafayette, IN 47907, USA

3. School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN 47907, USA

4. Department of Chemistry and Chemical Biology, Harvard University, Cambridge, MA 02138, USA

5. Madrid Institute for Advanced Studies, IMDEA Nanoscience, Ciudad Universitaria de Cantoblanco, 28049 Madrid, Spain.

6. School of Materials Engineering, Purdue University, West Lafayette, IN 47907, USA.

7. Department of NanoEngineering, University of California, San Diego, La Jolla, CA 92093, USA.

8. School of Mechanical Engineering, Purdue University, West Lafayette, IN 47907, USA.

Abstract

We report a low-cost, high-throughput benchtop method that enables thin layers of metal to be shaped with nanoscale precision by generating ultrahigh-strain-rate deformations. Laser shock imprinting can create three-dimensional crystalline metallic structures as small as 10 nanometers with ultrasmooth surfaces at ambient conditions. This technique enables the successful fabrications of large-area, uniform nanopatterns with aspect ratios as high as 5 for plasmonic and sensing applications, as well as mechanically strengthened nanostructures and metal-graphene hybrid nanodevices.

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

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