Characteristics of DLC films doped with multi-element alloy

Abstract

Abstract Multi-element alloy doped diamond-like carbon (DLC) films were coated using sputtering with a (AlCrNbSiTiV) target. TEM and XRD results indicated DLC film had an amorphous compound feature incorporating poly-crystalline phases around the face-center-cubic structure, which were embedded into the amorphous carbon matrix. The Raman spectra and mechanical characteristics of the DLC film sample were associated with concentration changes in the carbon and the multi-element alloy doped in the DLC films, which depended on the DC power. This investigation indicated that improved mechanical properties, including hardness and the elastic recovery rate, can be obtained from the multi-element alloy doped DLC film coated with proper DC sputtering power. These results demonstrated a proper DC power modifies the structure of multi-element alloy doped DLC film and improves its mechanical performance. This study should pave the way for the development of DLC film and elevate its application in various industries.